microscope n. 显微镜。 a binocular microscope 双目显微镜。 an electron microscope 电子显微镜。 a field ion emission microscope (比电子显微镜效率大5-10倍的)场致离子投影显微镜。 a reading microscope 读数显微镜。 a solar microscope 日光显微镜。
We call this measure as “ global - coarse and local - precise orientation ” , with which full - automation bonding is realized . first a micro vision positioning system based on zoom microscope is established after analysis of mems parts ’ property and bonding requirement , which gets both big visual range and high resolution 首先,本文在分析了mems器件的特点及键合要求后,建立了基于连续变倍显微物镜的显微视觉定位系统,成功解决了大视野、高精度显微视觉定位的关键技术。
In the whole bonding application , bond targets ’ identification and orientation are the most important aspects for full - automation . this dissertation introduces zoom microscope into the microscope positioning system to settle the contradiction between microscope ’ s visual range and depth of field . multiple scale images go through various image processing , and finally different bond targets are identified and positioned 将采集得到不同放大倍数时键合器件的清晰图像经过各种图像处理程序识别并分离出键合目标,通过一种“全局粗定位、局部精定位”的坐标变换方式完成了键合目标在操作空间中的精确定位。
Finally a novel algorithm flow is made to achieve 3d focusing with zoom microscope . for low enlargement images , global - coarse orientation is realized with auto - thresholding , corrosion - inflation operation and connected components labeling . and for large enlargement images , local - precise orientation is achieved by multiresolution wavelets segmentation on focus measure technique , which use the phenomena that images blur when out - of - focus 对于低放大倍数下的全局图像,主要利用形态学中的腐蚀膨胀操作、自动阈值分割、区域标记等技术完成了键合目标中心位置的粗定位;而对于高放大倍数下的局部图像,根据其半离焦的特征利用基于小波高频能量的多尺度显微图像分割方法实现了精定位。